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Beschreibung
Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method’s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.
Ripple Pyrometry for Flash Lamp Annealers
Details
| Verlag | Springer Fachmedien Wiesbaden GmbH |
| Ersterscheinung | 14. Januar 2016 |
| Maße | 21 cm x 14.8 cm |
| Gewicht | 192 Gramm |
| Format | Softcover |
| ISBN-13 | 9783658113872 |
| Auflage | 1st ed. 2015 |
| Seiten | 112 |
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