Short Distance Optical Interconnects using Silicon Microfabrication

Theory of optical waveguides is discussed with simulation results. Comparison between Fiber and Waveguides approach as a solution for short distance optical interconnects is done. A novel method has been developed for using 45¿ mirror surfaces for the vertical coupling of light into a channel for short distance optical interconnects. The method includes the structuring of silicon (100) wafer to act as a master tool, then using anisotropic etching followed by hot embossing of the master tool onto a desired substrate, in this case Liquid Crystal Polymer ( LCP). In this paper, the process flow to develop such a master tool is discussed, followed by an explanation of the process of hot embossing the master tool onto the LCP. Free space light transmission is shown in the stamped LCP substrate in a channel which is 8cm long and ~60 micrometer deep.