Robust Tuners for High-Q RF Tunable Resonators and Preselect Filters

Reconfigurable radio frequency (RF)/microwave components are needed to realize high performance multi-band/multi-mode radios. Such tunable components can potentially reduce the system complexity. However, careful attention must be given to their design in order to satisfy strict system level requirements. The objective of this work is to develop tunable technologies for high-Q preselect filters. The highly robust device design of electrostatic fringing field actuated (EFFA) microelectromechanical systems (MEMS) tuners is experimentally investigated and deployed in a tunable evanescent-mode cavity-based resonator. Electromagnetic, electromechanical, and mechanical testing is performed to demonstrate the inherently robust nature of the tuner. The latter half of the work is dedicated to enhancing the overall electromechanical performance of the tunable resonator. Traditional parallel-plate field tuners are employed to design reconfigurable resonators that exhibit an excellent balance between Q, tuning speed, frequency tuning, and volume.