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Hardcover - 9783540204817
235,39 €
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Beschreibung
Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.
Status and Challenges
Status and Challenges
Details
| Verlag | Springer Berlin |
| Ersterscheinung | 04. Dezember 2010 |
| Maße | 23.5 cm x 15.5 cm |
| Gewicht | 774 Gramm |
| Format | Softcover |
| ISBN-13 | 9783642058042 |
| Auflage | Softcover reprint of hardcover 1st edition 2004 |
| Seiten | 490 |
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