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Beschreibung
Plasma Processing of Semiconductors
contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Details
| Verlag | Springer Netherland |
| Ersterscheinung | 31. Mai 1997 |
| Maße | 23.5 cm x 15.5 cm |
| Gewicht | 1098 Gramm |
| Format | Hardcover |
| ISBN-13 | 9780792345671 |
| Auflage | 1997 |
| Seiten | 613 |
Schlagwörter
Atom- und Molekularphysik, Atomic - Molecular and Chemical Physics, Electrical and Electronic Engineering, Electronics and Microelectronics - Instrumentation, Elektronik, Elektrotechnik, Fertigungstechnik und Ingenieurwesen, Machines - Tools - Processes, Optical Materials, Technische Anwendung von elektronischen - magnetischen - optischen Materialien
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