Weitere Formate
Softcover - 9783319795393
106,99 €
Autorenfreundlich Bücher kaufen?!
Beschreibung
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
Fundamentals and Applications
Fundamentals and Applications
Details
| Verlag | Springer International Publishing |
| Ersterscheinung | 07. Januar 2016 |
| Maße | 23.5 cm x 15.5 cm |
| Gewicht | 787 Gramm |
| Format | Hardcover |
| ISBN-13 | 9783319238524 |
| Auflage | 1st ed. 2016 |
| Seiten | 409 |
Schlagwörter
Herstellerinformationen
Bekannt durch
