Nanofabrication: Techniques and Principles

Taschenbuch - 9783709116661
159,99 €
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Hardcover - 9783709104231
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Weitere Formate

Hardcover - 9783709104231
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Beschreibung

Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.

Details

Verlag Springer Vienna
Ersterscheinung Januar 2014
Maße 231 mm x 157 mm x 23 mm
Gewicht 540 Gramm
Format Taschenbuch
ISBN-13 9783709116661
Auflage 2012
Seiten 352

Schlagwörter