Multi-axis Nanopositioning using Magnetic Levitation

Nanomanipulation has become an essential tool for the development of current nanotechnology. The need of precision positioning stages is increasing drastically due to their crucial role in the fabrication of micro- and nano-sized objects and assemblies. This book presents development of magnetic levitation stages that meet the current demands of nanotechnology. The design considerations including the structural and thermal analysis are discussed in detail. Dynamic modeling and advanced control techniques are demonstrated. Various performance characteristics including precision positioning, payload capabilities and response to sudden load changes were tested. Contents of this book are based on the doctoral thesis of the author. The details of this research will be very helpful for the readers who are interested in developing similar stages from beginning.