Modeling Methods for CMOS MEMS Speaker

This thesis deals with methods and fundamentals to describe and model a micro electro-mechanical system. The system used is an inversely driven silicone microphone based on capacitive transducer technique. The inversely driven microphone acts like an electrostatic loudspeaker, which has to be interconnected in an array, because of its small area. With this array arrangement digital sound reconstruction and higher sound pressure levels can be realized. The electrostatic force and mechanical membrane deformation are modeled with the finite element method. Acoustic wave propagation is computed on the one hand with the finite element method and on the other hand with the Kirchhoff-Helmholtz integral. This ansatz represents an alternative computation method for open domain problems in acoustics.