Modeling and Simulation of FBAR on ANSYS Software

The piezoelectric & inverse piezoelectric effects are the actuation & detection mechanism involved in these devices. According to these principles, voltage applied to the resonator electrode induce strain of the acoustic layer & vice versa; after mechanical strain of the acoustic layer a voltage can be read out the electrodes. FBAR devices using piezoelectric films with thicknesses ranging from several micrometers down to tenth of micrometers resonate in the frequency range of roughly 100 MHz to 10 GHz. Device modeling and fabrication technology of FBAR has been included as a part of study in this project report. We worked on the ANSYS model of piezoelectric resonator and analyzed the modal, transient & harmonic analysis of the concerned circuit after FEM analysis of the device. Modal analysis provided the resonant frequencies at different modes; transient analysis resulted in the measurement of the current at different instants of time and the harmonic analysis of piezoelectric transducer derived the voltage magnitudes and phases at different instants followed by the graphical representation of voltage with respect to different frequencies.