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Beschreibung
This book introduces the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies are also discussed and light is shed on the potential applications of microsystems to nano-scale manipulation of matter. The book is a systematic, updated and quite complete treatise of its subject.
Details
| Verlag | Springer Wien |
| Ersterscheinung | 01. September 2006 |
| Maße | 24 cm x 17 cm |
| Gewicht | 790 Gramm |
| Format | Softcover |
| ISBN-13 | 9783211374535 |
| Auflage | 2006 |
| Seiten | 211 |
Schlagwörter
Computational Intelligence, Control - Robotics - Automation, Control - Robotics - Mechatronics, Electronics and Microelectronics - Instrumentation, Elektronik, Engineering Design, Engineering Fluid Dynamics, Konstruktion - Entwurf, Künstliche Intelligenz, Maschinenbau: Strömungsmechanik, Regelungstechnik
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