MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness

von Andrei Shkel, Cenk Acar
Taschenbuch - 9781441934895
149,98 €
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Hardcover - 9780387095356
181,89 €

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Weitere Formate

Hardcover - 9780387095356
181,89 €

Beschreibung

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

Details

Verlag Springer US
Ersterscheinung November 2010
Maße 235 mm x 155 mm x 14 mm
Gewicht 410 Gramm
Format Taschenbuch
ISBN-13 9781441934895
Auflage Softcover reprint of hardcover 1st ed. 2009
Seiten 268

Schlagwörter