Low Actuation Voltage RF MEMS Switch

Future 5G wireless communication systems having increased functionality and greater performance reliability would require Radio Frequency (RF) modules with smaller size and lower power consumption. Micro-Electro-Mechanical Systems (MEMS) have been identified as a promising enabling technology with the potential to reduce the weight, cost, size, and power consumption of existing RF subsystems. Micro/Nano structures could act as the building blocks for various RF MEMS/NEMS devices. RF MEMS switch, which is a vital component to achieve reconfigurability in RF subsystems is realized on ECPW platform. The proposed switch is observed to facilitate miniaturization of RF MEMS switches. The switch has been designed, fabricated and reported for low actuation voltage. Mechanical and RF performance of the proposed switch is measured. The pull-in voltage is reduced as compared to the conventional CPW switches, making it as a suitable candidate for high speed digital interconnect applications.