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Hardcover - 9783030232986
139,09 €
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Beschreibung
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.
From Basics to Applications
From Basics to Applications
Details
| Verlag | Springer International Publishing |
| Ersterscheinung | 14. August 2020 |
| Maße | 23.5 cm x 15.5 cm |
| Gewicht | 470 Gramm |
| Format | Softcover |
| ISBN-13 | 9783030233013 |
| Seiten | 288 |
Schlagwörter
Elektronik, Elektronische Geräte und Materialien, Fertigungstechnik und Ingenieurwesen, Laser, Laserphysik, Machines - Tools - Processes, Microsystems and MEMS, Microwaves - RF Engineering and Optical Communications, Optical Materials, Semiconductors, Technische Anwendung von elektronischen - magnetischen - optischen Materialien
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