DC Magnetron Sputtered Pure and Al Doped Cu2O Thin Films

Transparent conducting metal oxide thin films received the attention of many researchers for application in transparent electronics such as heterojunction solar cells, gas sensors, electrochromic devices, optoelectronic devices etc. Cuprous oxide (Cu2O) and copper aluminum oxide (CuAlO2) are transparent oxides exhibiting p-type conductivity. The properties of these materials in thin film mainly depend on the method of preparation and deposition conditions maintained during film growth. This book restrains the optimized deposition conditions of Cu2O and CuAlO2 films deposited on glass substrates using dc reactive magnetron sputtering technique,and investigated their structural, composition, microstructure, surface morphology, optical and electrical properties.The promising approach to prepare device quality films for optoelectronic devices was discussed clearly in this book.