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Beschreibung
This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.
Details
| Verlag | De Gruyter |
| Ersterscheinung | 22. November 2021 |
| Maße | 24 cm x 17 cm |
| Gewicht | 214 Gramm |
| Format | Softcover |
| ISBN-13 | 9783110712513 |
| Auflage | 1. Auflage |
| Seiten | 105 |