Aluminium Nitride based MEMS Acoustic Sensor

Aluminium Nitride based Sensor details the design, simulation and fabrication of AlN based MEMS acoustic sensor for high sound pressure level measurement that is beneficial to researchers as well as to students seeking to better understand the sensor fabrication and become more efficient and productive in sensor technology. This book details the comparison between different piezoelectric materials properties. It covers the major features of the semiconductor fabrication steps with both practical and theoretical aspects, which should appeal to readers with variety of interests and needs. The author, shares valuable knowledge and experience on acoustic sensor design, simulation and fabrication. Specific topics covered include design and mathematical modelling, mask layout, bulk micromachining and diaphragm optimization, mask design, development and optimization of AlN layer.