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Metal Impurities in Silicon-Device Fabrication

von Klaus Graff
Hardcover - 9783540642138
106,99 €
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Softcover - 9783642629655
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Beschreibung

Metal Impurities in Silicon-Device Fabrication treats the transition-metal impurities generated during the fabrication of silicon samples and devices. The different mechanisms responsible for contamination are discussed, and a survey is given of their impact on device performance. The specific properties of the main and rare impurities in silicon are examined, as well as the detection methods and requirements in modern technology. Finally, impurity gettering is studied along with modern techniques to determine the gettering efficiency. In all of these subjects, reliable and up-to-date data are presented. This monograph provides a thorough review of the results of recent scientific investigations, as well as the relevant data and properties of the various metal impurities in silicon. The new edition includes important recent data and a number of new tables.

Details

Verlag Springer Berlin
Ersterscheinung 18. Februar 2000
Maße 23.5 cm x 15.5 cm
Gewicht 606 Gramm
Format Hardcover
ISBN-13 9783540642138
Auflage Second Edition 2000
Seiten 270

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