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Softcover - 9783030067472
181,89 €
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Beschreibung
This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices’ performance. Several control and possible gettering approaches are addressed. The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.
Origin, Characterization, Control, and Device Impact
Origin, Characterization, Control, and Device Impact
Details
| Verlag | Springer International Publishing |
| Ersterscheinung | 22. August 2018 |
| Maße | 23.5 cm x 15.5 cm |
| Gewicht | 869 Gramm |
| Format | Hardcover |
| ISBN-13 | 9783319939247 |
| Auflage | 1st ed. 2018 |
| Seiten | 438 |
Schlagwörter
Characterization and Analytical Technique, Electronic Circuits and Systems, Elektronik, Elektronische Geräte und Materialien, Microwaves - RF Engineering and Optical Communications, Optical Materials, Schaltkreise und Komponenten (Bauteile), Semiconductors, Technische Anwendung von elektronischen - magnetischen - optischen Materialien, Werkstoffprüfung
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