Calibration of Micro-nanopositioning Robots

High accuracy is usually the necessary condition of the system performance. However, there are many sources of inaccuracy acting on microrobotic systems. At the microscale, it is very difficult to accurately measure the performances (positioning accuracy) of the micro-nano robots and to characterize the influences of the imperfections. The calibration of microrobotic systems combining all these sources is rarely studied and their relative importance remains unknown. The originalities and contributions of this book lie in two aspects: 1. characterization of micro-nano robots performances and influences of imperfections; 2. dealing with performance improvements of micro-nano robots based on different kinds of models.