{"product_id":"nanolithography-a-borderland-between-stm-eb-ib-and-x-ray-lithographies-von-m-gentili-carlo-giovannella-stefano-selci-hrsg","title":"Nanolithography","description":"\n                                Success in the fabrication of structures at the nanometer  length scale has opened up a new horizon to condensed matter physics:  the study of quantum phenomena in confined boxes, wires, rings, etc. A  new class of electronic devices based on this physics has been  proposed, with the promise of a new functionality for ultrafast and\/or  ultradense electronic circuits. Such applications demand highly  sophisticated fabrication techniques, the crucial one being  lithography. \n                \n                \u003cbr\u003e\n                                  \n                \n                \u003cem\u003eNanolithography\u003c\/em\u003e\n                                 contains updated reviews by major experts on the  well established techniques -- electron beam lithography (EBL), X-ray  lithography (XRL), ion beam lithography (IBL) -- as well as on  emergent techniques, such as scanning tunnelling lithography (STL).  \n                \n                \u003cbr\u003e\n                            \n            \u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9780792327943\"\u003e\u003ch3\u003eA Borderland between STM, EB, IB, and X-Ray Lithographies\u003c\/h3\u003e\u003c\/div\u003e\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9789048143887\"\u003e\u003ch3\u003eA Borderland between STM, EB, IB, and X-Ray Lithographies\u003c\/h3\u003e\u003c\/div\u003e","brand":"Libri","offers":[{"title":"Hardcover - 9780792327943","offer_id":50827066950,"sku":"9780792327943","price":213.99,"currency_code":"EUR","in_stock":true},{"title":"Softcover - 9789048143887","offer_id":39415355572317,"sku":"9789048143887","price":213.99,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0622\/files\/62bf9ae3-dfa0-43d7-86e2-49c08dd95309.jpg?v=1760681579","url":"https:\/\/shop.autorenwelt.de\/products\/nanolithography-a-borderland-between-stm-eb-ib-and-x-ray-lithographies-von-m-gentili-carlo-giovannella-stefano-selci-hrsg","provider":"Autorenwelt Shop","version":"1.0","type":"link"}