{"product_id":"micro-electronic-and-mechanical-systems-von-kenichi-takahata-hrsg","title":"Micro Electronic and Mechanical Systems","description":"\u003cp\u003eThis book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.\u003c\/p\u003e\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9789533070278\"\u003e\u003ch3\u003e\u003c\/h3\u003e\u003c\/div\u003e","brand":"Libri","offers":[{"title":"Hardcover - 9789533070278","offer_id":28292776919133,"sku":"9789533070278","price":175.0,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0622\/files\/7b31c0ff-1528-4faa-9e0d-2453b0f7689c.jpg?v=1763195914","url":"https:\/\/shop.autorenwelt.de\/products\/micro-electronic-and-mechanical-systems-von-kenichi-takahata-hrsg","provider":"Autorenwelt Shop","version":"1.0","type":"link"}