{"product_id":"mev-electron-irradiation-of-si-heterostructures-von-sonia-kaschieva-sergey-n-dmitriev","title":"MeV electron irradiation of Si heterostructures","description":"\u003cp\u003eRadiation defect generation by high-energy MeV electron irradiation of n- and p- type Si-SiO2 structure with different kind of oxides has been studied. The morphology changes of SiO2 oxide during MeV electrons irradiation was observed by AFM. Si+ ion implanted Si-SiO2 structures before and after MeV electron irradiation are presented. The redistribution of oxygen and silicon atoms and Si nanocrystal generation during MeV electron irradiation was observed by RBS\/C and AFM techniques respectively. Optical properties, photoluminescence and spectroscopic studies of SiOx films irradiated with MeV electrons are carried out also.\u003c\/p\u003e\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9786138502845\"\u003e\u003ch3\u003e\u003c\/h3\u003e\u003c\/div\u003e","brand":"Libri","offers":[{"title":"Softcover - 9786138502845","offer_id":39455222726749,"sku":"9786138502845","price":67.9,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0622\/files\/b8c6b196-d9b5-49ef-b203-6ef2d85299c6.jpg?v=1774938151","url":"https:\/\/shop.autorenwelt.de\/products\/mev-electron-irradiation-of-si-heterostructures-von-sonia-kaschieva-sergey-n-dmitriev","provider":"Autorenwelt Shop","version":"1.0","type":"link"}