{"product_id":"mav-obluchenie-alektronami-geterostruktur-si-von-sonq-kashiewa-sergej-n-dmitriew","title":"MäV-obluchenie älektronami geterostruktur Si","description":"\u003cp\u003eIzucheno obrazowanie radiacionnyh defektow pri wysokoänergeticheskom MäV-älektronnom obluchenii struktury Si-SiO2 n- i p-tipa s razlichnymi widami oxidow. Morfologicheskie izmeneniq oxida SiO2 pri obluchenii älektronow MäV-älementow nablüdalis' pri ASM. Predstawleny iony Si+, implantirowannye Si-SiO2 struktury do i posle oblucheniq älektronami MäV. Pereraspredelenie atomow kisloroda i kremniq i generaciq nanokristallow Si pri obluchenii älektronow MäV nablüdalis' metodami BKS\/S i ASM sootwetstwenno. Takzhe prowedeny opticheskie swojstwa, fotolüminescenciq i spektroskopicheskie issledowaniq plenok SiOx, obluchennyh MäV-älektronami.\u003c\/p\u003e\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9786200995780\"\u003e\u003ch3\u003e\u003c\/h3\u003e\u003c\/div\u003e","brand":"Libri","offers":[{"title":"Softcover - 9786200995780","offer_id":39464644116573,"sku":"9786200995780","price":35.8,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0622\/files\/525a5e7b-adbf-44dd-84f2-0b1cdf5d247f.jpg?v=1757398283","url":"https:\/\/shop.autorenwelt.de\/products\/mav-obluchenie-alektronami-geterostruktur-si-von-sonq-kashiewa-sergej-n-dmitriew","provider":"Autorenwelt Shop","version":"1.0","type":"link"}