{"product_id":"jelementy-tehnologicheskih-ustanowok-w-mikroalektronnom-proizwodstwe-von-nikolaj-lemeshko","title":"Jelementy tehnologicheskih ustanowok w mikroälektronnom proizwodstwe","description":"\u003cp\u003eRabota poswqschena woprosu tehnologicheskogo osnascheniq mikroälektronnogo proizwodstwa. V knige priwoditsq informaciq o naznachenii i konstrukcii älementow tehnologicheskih ustanowok, obespechiwaüschih serijnoe mikroälektronnoe proizwodstwo. Rassmatriwaütsq sredstwa sozdaniq i kontrolq wakuuma, metody i sredstwa ispareniq materialow, poluchenie i kontrol' parametrow tonkih plenok, ustrojstwa äpitaxial'nogo naraschiwaniq, metody i sredstwa polucheniq zaschitnyh diälektricheskih sloew, metody i osnaschenie dlq legirowaniq poluprowodnikow. Priwodimaq informaciq mozhet byt' polezna inzheneram, tehnologam, razrabotchikam mikroälektronnyh izdelij, a takzhe studentam wysshih tehnicheskih uchebnyh zawedenij.\u003c\/p\u003e\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9783659808548\"\u003e\u003ch3\u003e\u003c\/h3\u003e\u003c\/div\u003e","brand":"Libri","offers":[{"title":"Softcover - 9783659808548","offer_id":39435460378717,"sku":"9783659808548","price":39.9,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0622\/files\/f57e63c1-dc1f-4ea2-86da-4ce33cff2239.jpg?v=1757655191","url":"https:\/\/shop.autorenwelt.de\/products\/jelementy-tehnologicheskih-ustanowok-w-mikroalektronnom-proizwodstwe-von-nikolaj-lemeshko","provider":"Autorenwelt Shop","version":"1.0","type":"link"}