{"product_id":"immersion-nanoimprint-lithography-von-harutaka-mekaru","title":"Immersion Nanoimprint Lithography","description":"\u003cp\u003eThermal nanoimprinting is used to modify a manufacturing process as simple fabrication technology that transfers a fine pattern by pressing a mold with nanoscale patterns against a thermoplastic. The molds can be categorized roughly into two types, namely, a positive mold with a convex pattern, and a negative mold with a concave pattern compared with the base level. Around each concave imprinted pattern, the compressed air that is caused by the imprint pressure, generates capillary bridges; and in case of a convex imprinted pattern the trapped air remaining inside the concave mold pattern gives rise to bubble defects. In order to remove such defective molding, I propose a novel technique that I name as ¿immersion nanoimprint¿ where a fluorine liquid is inserted between the mold pattern and the molding material. In this technique, a fluorine liquid improved accuracy remarkably, and realized a complete filling at a low imprint pressure. Also, it was confirmed that the uniformity was greatly improved by improved heat transfer. Thus the immersion nanoimprint lithography is expected to be one of the epoch-making solution that can dramatically decrease the formation of defective molding.\u003c\/p\u003e\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9783659482946\"\u003e\u003ch3\u003e\u003c\/h3\u003e\u003c\/div\u003e","brand":"Libri","offers":[{"title":"Softcover - 9783659482946","offer_id":39433823453277,"sku":"9783659482946","price":39.9,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0622\/files\/9225da48-5267-40d1-9b04-0c13fdd4cd55.jpg?v=1773469068","url":"https:\/\/shop.autorenwelt.de\/products\/immersion-nanoimprint-lithography-von-harutaka-mekaru","provider":"Autorenwelt Shop","version":"1.0","type":"link"}