{"product_id":"flux-profile-modeling-using-monte-carlo-simulation-von-ramprasad-vijayagopal-und-rama-venkat","title":"Flux Profile Modeling using Monte Carlo Simulation","description":"\u003cp\u003eMolecular Beam Epitaxy (MBE) is a process by which  semiconductor films are grown on the substrate by  physical vapor deposition of the source material in  an ultra high vacuum environment. Spatial variations  in flux are a result of the shape of the crucible  and the geometry of the growth chamber. A process  simulation tool for MBE based on a phenomenological  model is proposed and elaborated. The tool can be  used in industry to simulate the effusion and  deposition of molecular beams by taking into account  different parameters that influence the process.  Additionally, it can generate deposition profiles  created by effusing flux species, on the platen  containing the wafers.\u003c\/p\u003e\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9783838369389\"\u003e\u003ch3\u003eA simulation tool for deposition processess using Molecular Beam Epitaxy\u003c\/h3\u003e\u003c\/div\u003e","brand":"Autorenwelt Shop","offers":[{"title":"Softcover - 9783838369389","offer_id":39469133332573,"sku":"9783838369389","price":49.0,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0622\/files\/9fedaab4-f82b-4a69-909d-074c58fec528.jpg?v=1757827304","url":"https:\/\/shop.autorenwelt.de\/products\/flux-profile-modeling-using-monte-carlo-simulation-von-ramprasad-vijayagopal-und-rama-venkat","provider":"Autorenwelt Shop","version":"1.0","type":"link"}