{"product_id":"fluorine-enriched-silicon-properties-and-advantages-von-giuliana-impellizzeri","title":"Fluorine enriched silicon: properties and advantages","description":"\u003cp\u003eSi-based microelectronic community is experiencing a sort of revolution, in order to meet the scaling rate demanded by high-tech industries. Shallow p-type junctions with high active dopant concentrations are needed. The F capability in helping the B confinement in Si is widely recognized, even if there is not a general consensus on the physical mechanisms acting. Different mechanisms have been proposed: a chemical bonding between F and B; or a F interaction with point defects, through the formation of F-I (interstitial) or F-V (vacancy) complexes. This thesis investigates the F behaviour in pre-amorphized Si, opening a new route towards the F profile engineering. F is shown to strongly modify Is and Vs population, inducing an Is undersaturation or a Vs supersaturation. Such effect is transient, because strictly correlated to the transient presence of F in the Si samples. Our results allow a point defect engineering by means of F, ruling out the F-B chemical bonding as the responsible for B diffusion reduction by F, and suggesting the F-V bonding as the key mechanism governing the F behaviour in pre-amorphized Si and its capability in controlling the point defect population.\u003c\/p\u003e\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9783843374088\"\u003e\u003ch3\u003eInteraction between point defects, fluorine and boron atoms in crystalline silicon\u003c\/h3\u003e\u003c\/div\u003e","brand":"Autorenwelt Shop","offers":[{"title":"Softcover - 9783843374088","offer_id":39470069907549,"sku":"9783843374088","price":49.0,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0622\/files\/c103df63-9212-464f-969b-af2103180712.jpg?v=1757912609","url":"https:\/\/shop.autorenwelt.de\/products\/fluorine-enriched-silicon-properties-and-advantages-von-giuliana-impellizzeri","provider":"Autorenwelt Shop","version":"1.0","type":"link"}