{"product_id":"extreme-ultraviolet-lithography-von-undefined","title":"Extreme ultraviolet lithography","description":"Anmerkung der Shop-Redaktion: Leider liegt bei uns für dieses Buch (noch) keine Beschreibung vor.\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9786132732125\"\u003e\u003ch3\u003eNext-generation lithography, Extreme ultraviolet, Valence electron,        Interference lithography, Off-axis illumination, Immersion lithography\u003c\/h3\u003e\u003c\/div\u003e","brand":"Autorenwelt Shop","offers":[{"title":"Softcover - 9786132732125","offer_id":57353257091397,"sku":"9786132732125","price":116.0,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0622\/files\/0ada787b-ea22-44b0-b2bf-1251c0b42977.jpg?v=1773299152","url":"https:\/\/shop.autorenwelt.de\/products\/extreme-ultraviolet-lithography-von-undefined","provider":"Autorenwelt Shop","version":"1.0","type":"link"}