{"product_id":"electron-beam-lithography-von-undefined","title":"Electron Beam Lithography","description":"Anmerkung der Shop-Redaktion: Leider liegt bei uns für dieses Buch (noch) keine Beschreibung vor.\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9786132844941\"\u003e\u003ch3\u003eElectron, Photolithography, Integrated circuit, Nanotechnology,        Diffraction-limited system, Nanometre, Maskless lithography, Photomask\u003c\/h3\u003e\u003c\/div\u003e","brand":"Autorenwelt Shop","offers":[{"title":"Softcover - 9786132844941","offer_id":57483118805317,"sku":"9786132844941","price":136.0,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0622\/files\/07ef4d87-e9d3-4e3b-8748-329634be8ad5.jpg?v=1774508973","url":"https:\/\/shop.autorenwelt.de\/products\/electron-beam-lithography-von-undefined","provider":"Autorenwelt Shop","version":"1.0","type":"link"}