{"product_id":"a-kinetic-model-for-the-oxidation-of-silicon-germanium-alloys-von-mohamed-rabie","title":"A Kinetic Model for the Oxidation of Silicon Germanium Alloys","description":"\u003cp\u003eSilicon germanium alloys have received much  attention in recent years for their potential  application in high speed and optoelectronics  applications. Kinetics of SiGe oxidation need to be  well understood for two reasons: (1) to allow  predictive process modeling of the oxidation process  for technology development; and (2) to give insight  into the factors that are responsible for the poor  electrical quality of the resulting oxide. Some  models have been proposed to explain the outcomes of  the oxidation process, yet a complete model is still  unavailable. It has been shown that the resulting  oxide can be either pure SiO2 or mixed oxides (SiO2  + GeO2). As well, the oxidation process can result  in a layered structure of both types of oxides.  Based on the understanding of the physical phenomena  that occur during the oxidation process, we  concluded a physical model that encompasses the  explanations reported by other researchers as well  as some conclusions we derived.\u003c\/p\u003e\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9783838348575\"\u003e\u003ch3\u003eA Complete Physical and Mathematical Model\u003c\/h3\u003e\u003c\/div\u003e","brand":"Autorenwelt Shop","offers":[{"title":"Softcover - 9783838348575","offer_id":39469249167453,"sku":"9783838348575","price":59.0,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0622\/files\/a37f7210-8587-446c-8f48-5165e0bd76b9.jpg?v=1759035112","url":"https:\/\/shop.autorenwelt.de\/products\/a-kinetic-model-for-the-oxidation-of-silicon-germanium-alloys-von-mohamed-rabie","provider":"Autorenwelt Shop","version":"1.0","type":"link"}