{"product_id":"x-ray-optics-made-by-x-ray-lithography-process-optimization-and-quality-control-von-frieder-johannes-koch","title":"X-ray optics made by X-ray lithography: Process optimization and quality control","description":"Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio – their fabrication by X-ray lithography with optimal structure quality is the topic of this work.\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9783731506799\"\u003e\u003ch3\u003e\u003c\/h3\u003e\u003c\/div\u003e","brand":"Libri","offers":[{"title":"Softcover - 9783731506799","offer_id":39441422876765,"sku":"9783731506799","price":41.0,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0622\/files\/de816e61-c9ac-4de8-9023-72552ad2549f.jpg?v=1776920140","url":"https:\/\/shop.autorenwelt.de\/en\/products\/x-ray-optics-made-by-x-ray-lithography-process-optimization-and-quality-control-von-frieder-johannes-koch","provider":"Autorenwelt Shop","version":"1.0","type":"link"}