{"product_id":"updates-in-advanced-lithography-von-sumio-hosaka-hrsg","title":"Updates in Advanced Lithography","description":"\u003cp\u003eAdvanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches to 20 nm size in advanced electron device. Consequently, we have to study and develop true single nanometer size lithography. One of the solutions is to study a fusion of top down and bottom up technologies such as EB drawing and self-assembly with block copolymer. In MEMS and nano-photonics, 3 dimensional structures are needed to achieve some functions in the devices for the applications. Their formation are done by several methods such as colloid lithography, stereo-lithography, dry etching, sputtering, deposition, etc. This book covers a wide area regarding nano-lithography, nano structure and 3-dimensional structure, and introduces readers to the methods, methodology and its applications.\u003c\/p\u003e\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9789535111757\"\u003e\u003ch3\u003e\u003c\/h3\u003e\u003c\/div\u003e","brand":"Libri","offers":[{"title":"Hardcover - 9789535111757","offer_id":28687155658845,"sku":"9789535111757","price":129.0,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0622\/files\/875b4e2d-837e-4bd1-a110-9eb91949a8c4.jpg?v=1757485025","url":"https:\/\/shop.autorenwelt.de\/en\/products\/updates-in-advanced-lithography-von-sumio-hosaka-hrsg","provider":"Autorenwelt Shop","version":"1.0","type":"link"}