{"product_id":"ultraviolet-nanoimprint-lithography-fabrication-of-ordered-nanostructures-integrated-optics-and-electronic-devices-von-elisabeth-lausecker","title":"Ultraviolet nanoimprint lithography","description":"\u003cp\u003eNanoimprint lithography (NIL) is a lithographic technique that allows the patterning of substrates with nanostructures over large areas with high density. NIL relies on the simplicity of mechanically deforming a polymeric resist layer by a patterned mold. The author gives a detailed introduction to NIL and developed ultraviolet NIL for the pit-patterning of substrate surfaces. By combining the self-assembled growth of silicon-germanium (SiGe) islands by molecular-beam epitaxy with the pit-patterning of the Si substrate, an ordering of the islands is achieved. Both, a position-control of the SiGe islands and an improvement of their homogeneity and emission efficiency is accomplished. Moreover, the work towards integrating these ordered SiGe islands into a two-dimensional photonic crystal slab was pursued, demanding a second imprinted layer precisely aligned to the first one. Finally, self-aligned imprint lithography was developed at Princeton University, USA, for the fabrication of the first top-gate amorphous Si thin-film transistor. The book contains detailed descriptions of executed process steps.\u003c\/p\u003e\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9783838130804\"\u003e\u003ch3\u003eFabrication of ordered nanostructures, integrated optics and electronic devices\u003c\/h3\u003e\u003c\/div\u003e","brand":"Libri","offers":[{"title":"Softcover - 9783838130804","offer_id":39441566040157,"sku":"9783838130804","price":89.9,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0622\/files\/2ee22f64-f02d-476d-bf58-730d3edde5a7.jpg?v=1774759390","url":"https:\/\/shop.autorenwelt.de\/en\/products\/ultraviolet-nanoimprint-lithography-fabrication-of-ordered-nanostructures-integrated-optics-and-electronic-devices-von-elisabeth-lausecker","provider":"Autorenwelt Shop","version":"1.0","type":"link"}