{"product_id":"preparation-and-characterization-of-low-k-material-for-microelectronics-von-merlin-nsenkoue","title":"Preparation and characterization of low-k material for microelectronics:","description":"\u003cp\u003eOn the morning of my professional career, as research and development engineer, I had the chance to work at the Institute of Micro Electronic Center (IMEC). This book presents the work I have done from February till September 2007 and its focuses on the investigation of mechanical properties of low-k materials using opto-acoustic technique. Before approaching the opto-acoustic method itself, I practiced the techniques of thin films deposition, plasma treatment and spectro-ellipsometric characterization of materials. Unlike spectro-ellipsometric thin films study, the opto-acoustic characterization requires working with samples which include a transducer material. So, at first, we have designed some samples geometries to be analyzed. The goal of this comparative study (mechanic and acoustic) is not only to establish a correlation between nanoindentation and acoustic wave techniques, but also to determine the factors which best describe mechanical properties of low-k materials. The work has been done in collaboration with the Laboratory of Condensed Matter Physics (LPEC), located in Le Mans (France).\u003c\/p\u003e\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9786204208480\"\u003e\u003ch3\u003ePossible development of mechanical characterization at submicrometric scales with laser ultrasonics technique\u003c\/h3\u003e\u003c\/div\u003e","brand":"Autorenwelt Shop","offers":[{"title":"Softcover - 9786204208480","offer_id":39491296624733,"sku":"9786204208480","price":26.9,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0622\/files\/3556c7aa-11d8-477b-b102-83748b6cdb50.jpg?v=1773559156","url":"https:\/\/shop.autorenwelt.de\/en\/products\/preparation-and-characterization-of-low-k-material-for-microelectronics-von-merlin-nsenkoue","provider":"Autorenwelt Shop","version":"1.0","type":"link"}