{"product_id":"modeling-of-thermal-oxidation-and-stress-effects-von-christian-hollauer","title":"Modeling of Thermal Oxidation and Stress Effects","description":"\u003cp\u003eThermal Oxidation is one of the most important\u003c\/p\u003e\u003cp\u003eprocess steps in semiconductor fabrication to produce\u003c\/p\u003e\u003cp\u003ehigh quality isolation layers. A chemical reaction\u003c\/p\u003e\u003cp\u003econverts silicon into silicon dioxide which has more\u003c\/p\u003e\u003cp\u003ethan twice of the original volume. This is the main\u003c\/p\u003e\u003cp\u003esource for stress and displacements in the oxidized\u003c\/p\u003e\u003cp\u003estructure. \u003c\/p\u003e\u003cp\u003eStress in copper interconnects can be essential for\u003c\/p\u003e\u003cp\u003ethe life time of an integrated circuit, because it\u003c\/p\u003e\u003cp\u003ecan support material transport and lead to void\u003c\/p\u003e\u003cp\u003eformation. \u003c\/p\u003e\u003cp\u003eDuring the fabrication of sensors, where thin film\u003c\/p\u003e\u003cp\u003edeposition is often used, an intrinsic stress is\u003c\/p\u003e\u003cp\u003egenerated in the layers which can cause unwanted\u003c\/p\u003e\u003cp\u003edeformation in free standing structures. \u003c\/p\u003e\u003cp\u003eAfter an introduction the author describes the\u003c\/p\u003e\u003cp\u003eadvanced oxidation model and shows by means of\u003c\/p\u003e\u003cp\u003epictures the verified simulation results. A highlight\u003c\/p\u003e\u003cp\u003eof this book is the chapter about the Finite Element\u003c\/p\u003e\u003cp\u003eMethod (FEM) which is used to solve the mathematical\u003c\/p\u003e\u003cp\u003eformulation numerically. In a comprehensible way the\u003c\/p\u003e\u003cp\u003eauthor describes how to apply FEM in practice, so\u003c\/p\u003e\u003cp\u003ethat the reader of this book should be able to\u003c\/p\u003e\u003cp\u003ediscretize many other kinds of differential equations\u003c\/p\u003e\u003cp\u003eand solve them with a computer, which is basic for\u003c\/p\u003e\u003cp\u003esimulation.\u003c\/p\u003e\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9783838105321\"\u003e\u003ch3\u003ewith the Finite Element Method\u003c\/h3\u003e\u003c\/div\u003e","brand":"Autorenwelt Shop","offers":[{"title":"Softcover - 9783838105321","offer_id":39498876616797,"sku":"9783838105321","price":89.0,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0622\/files\/b62100d1-a5ee-4ae1-b958-034e55eeb8f8.jpg?v=1777961792","url":"https:\/\/shop.autorenwelt.de\/en\/products\/modeling-of-thermal-oxidation-and-stress-effects-von-christian-hollauer","provider":"Autorenwelt Shop","version":"1.0","type":"link"}