{"product_id":"micromachined-ultrasound-based-proximity-sensors-von-oliver-brand-mark-r-hornung","title":"Micromachined Ultrasound-Based Proximity Sensors","description":"\n                \u003cem\u003eMicromachined Ultrasound-Based Proximity Sensors\u003c\/em\u003e presents  a packaged ultrasound microsystem for object detection and distance  metering based on micromachined silicon transducer elements. It  describes the characterization, optimization and the long-term  stability of silicon membrane resonators as well as appropriate  packaging for ultrasound microsystems. \u003cbr\u003e  \u003cem\u003eMicromachined Ultrasound-Based Proximity Sensors\u003c\/em\u003e describes a  cost-effective approach to the realization of a micro electro  mechanical system (MEMS). The micromachined silicon transducer  elements were fabricated using industrial IC technology combined with  standard silicon micromachining techniques. Additionally, this  approach allows the cointegration of the driving and read-out  circuitry. To ensure the industrial applicability of the fabricated  transducer elements intensive long-term stability and reliability  tests were performed under various environmental conditions such as  high temperature and humidity. \u003cbr\u003e  Great effort was undertaken to investigate the packaging and housing  of the ultrasound system, which mainly determine the success or  failure of an industrial microsystem. A low-stress mounting of the  transducer element minimizes thermomechanical stress influences. The  developed housing not only protects the silicon chip but also improves  the acoustic performance of the transducer elements. \u003cbr\u003e  The developed ultrasound proximity sensor system can determine object  distances up to 10 cm with an accuracy of better than 0.8 mm. \u003cbr\u003e  \u003cem\u003eMicromachined Ultrasound-Based Proximity Sensors\u003c\/em\u003e will be of  interest to MEMS researchers as well as those involved in solid-state  sensor development.\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9780792385080\"\u003e\u003ch3\u003e\u003c\/h3\u003e\u003c\/div\u003e\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9781461372691\"\u003e\u003ch3\u003e\u003c\/h3\u003e\u003c\/div\u003e","brand":"Libri","offers":[{"title":"Hardcover - 9780792385080","offer_id":50819121926,"sku":"9780792385080","price":106.99,"currency_code":"EUR","in_stock":true},{"title":"Softcover - 9781461372691","offer_id":39415640588381,"sku":"9781461372691","price":106.99,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0622\/files\/3c284ea9-d433-4b5f-800a-6fa85784582c.jpg?v=1761801393","url":"https:\/\/shop.autorenwelt.de\/en\/products\/micromachined-ultrasound-based-proximity-sensors-von-oliver-brand-mark-r-hornung","provider":"Autorenwelt Shop","version":"1.0","type":"link"}