{"product_id":"micro-and-nano-fabrication-tools-and-processes-von-hans-heinrich-gatzen-volker-saile-juerg-leuthold-1","title":"Micro and Nano Fabrication","description":"\n                                \n                \u003cp\u003eFor Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS\/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.\u003c\/p\u003e\n                            \n            \u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9783662508268\"\u003e\u003ch3\u003eTools and Processes\u003c\/h3\u003e\u003c\/div\u003e\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9783662443941\"\u003e\u003ch3\u003eTools and Processes\u003c\/h3\u003e\u003c\/div\u003e","brand":"Libri","offers":[{"title":"Softcover - 9783662508268","offer_id":39441153392733,"sku":"9783662508268","price":90.94,"currency_code":"EUR","in_stock":true},{"title":"Hardcover - 9783662443941","offer_id":40271501656157,"sku":"9783662443941","price":128.39,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0622\/files\/2c0d257f-0261-416c-9b6f-ae478afe3b18.jpg?v=1779342104","url":"https:\/\/shop.autorenwelt.de\/en\/products\/micro-and-nano-fabrication-tools-and-processes-von-hans-heinrich-gatzen-volker-saile-juerg-leuthold-1","provider":"Autorenwelt Shop","version":"1.0","type":"link"}