{"product_id":"development-of-mass-microsensors-for-implantable-mems-von-martin-zalazar","title":"Development of Mass Microsensors for Implantable MEMS","description":"\u003cp\u003eGlaucoma is a disease that affects tens of millions of people around the world. The development of MEMS and the generation of new materials allow the development of implantable micro-devices with improved biocompatibility. The knowledge of biomolecules associated with the glaucoma pathology will increase the effectiveness of a microvalve for glaucoma tretmentt. In this sense, a mass microsensor capable of sensing biomolecules is desirable. This book was focused on the design, simulation, fabrication and characterization of MEMS-based mass microsensors for the detection of biomolecules. Regarding the biocompatibility, UNCD and Parylene were used as structural materials; as piezoelectric materials, quartz, PVDF and AlN were used. The parameters of the resonators were extracted by using 3D FEM models and experimental results. UNCD films used as substrate, yielded a highly oriented (002) AlN films even as thin as 80 nm; it exhibited a piezoelectric coefficient of about 5.3 pm\/V, one of the highest demonstrated today. AlN\/diamond structure is a very promising device for FBAR applications so it opens a huge field of biomedical applications.\u003c\/p\u003e\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9783639708363\"\u003e\u003ch3\u003e\u003c\/h3\u003e\u003c\/div\u003e","brand":"Libri","offers":[{"title":"Softcover - 9783639708363","offer_id":39423912378461,"sku":"9783639708363","price":94.9,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0622\/files\/70de8bd0-0612-4c2b-8e1c-965682e4caac.jpg?v=1768976168","url":"https:\/\/shop.autorenwelt.de\/en\/products\/development-of-mass-microsensors-for-implantable-mems-von-martin-zalazar","provider":"Autorenwelt Shop","version":"1.0","type":"link"}