{"product_id":"design-of-a-monolithic-3dof-mems-capacitive-accelerometer-von-muhammad-shuja-khan","title":"Design of a Monolithic 3DOF MEMS Capacitive Accelerometer","description":"\u003cp\u003eSensors and devices, based on micromachining technology, known as micro-electro-mechanicalsystems or MEMS, have been received increasing attention so far in recent years. Micromachined inertial sensors, consisting of accelerometers and gyroscopes, are one of the most important types of silicon-based sensor. MEMS capacitive accelerometers have been extensively used in automobiles, inertial navigation systems, earth quake detection and many other bio-medical applications. This book deals with the design of a monolithic 3DOF MEMS capacitive accelerometer using both analytical and numerical techniques. Monolithic accelerometer is a single structure having three individual single axis Accelerometers on a single substrate and utilizes a surface micromachining technology using standard PolyMUMPs process. The designed accelerometer is 3mm×3.1mm in size, has low mechanical noise floor, high sense capacitance and high sensitivity along in-plane (x and y) and out-of-plane (z) axes. Performing a detailed finite element analysis in ANSYS 11.o, physical level simulation has been done to verify the deflection for x, y and z axes with respect to the applied acceleration (g).\u003c\/p\u003e\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9783845409528\"\u003e\u003ch3\u003eUtilizing Surface Micromachining Technology Using PolyMUMPS Process\u003c\/h3\u003e\u003c\/div\u003e","brand":"Autorenwelt Shop","offers":[{"title":"Softcover - 9783845409528","offer_id":39471167406173,"sku":"9783845409528","price":49.0,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0622\/files\/ae9c6196-a67e-45be-9c3b-9e8b9aaaef33.jpg?v=1769667652","url":"https:\/\/shop.autorenwelt.de\/en\/products\/design-of-a-monolithic-3dof-mems-capacitive-accelerometer-von-muhammad-shuja-khan","provider":"Autorenwelt Shop","version":"1.0","type":"link"}