{"product_id":"design-of-a-capacitive-based-closed-loop-displacement-sensor-von-johan-schabbink","title":"Design of a Capacitive based Closed-Loop Displacement Sensor","description":"\u003cp\u003eThe starting concept is decomposed into system elements which have one function. For  each system element a model is created that describes the behaviour of the element.  Each system element model is than developed into a physical part of a MEMS system. During  development the place on the structure and available space are closely monitored. Each part is designed for optimal resolution. The next step is to put all the physical MEMS parts together  into a complete MEMS structure.  With the MEMS structure defined, the last piece of the system can be designed. The controller  is also the most essential part of the system because the MEMS structure itself is unstable  during operation. The controller provides stability to the structure and is therefore very  important. Bandwidth and stability are carefully balanced during the design of the controller.\u003c\/p\u003e\u003cdiv class=\"aw-variant-hidden-subtitle-div\" id=\"aw-variant-subtitle-9783659107948\"\u003e\u003ch3\u003eConceptual design of a MEMS displacement sensor smaller than 1x1 mm with a resolution of 1 nanometer\u003c\/h3\u003e\u003c\/div\u003e","brand":"Autorenwelt Shop","offers":[{"title":"Softcover - 9783659107948","offer_id":39489856766045,"sku":"9783659107948","price":49.0,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0622\/files\/22a57feb-a716-471e-ba01-1e87444536c1.jpg?v=1773295687","url":"https:\/\/shop.autorenwelt.de\/en\/products\/design-of-a-capacitive-based-closed-loop-displacement-sensor-von-johan-schabbink","provider":"Autorenwelt Shop","version":"1.0","type":"link"}